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A study on the sourcedrain junction defect of eximer laser annealed polycrystaline thin film transistor
다결정 실리콘 박막 트랜지스터의 소오스드레인 접합부 결함에 대한 연구

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Authors
김재신
Advisor
한민구
Issue Date
2003
Publisher
서울대학교 대학원
Keywords
다결정 실리콘Polycrystalline silicon박막 트랜지스터Thin film transistorELAElaIon implantationDamageDiffraction
Description
Thesis (master`s)--서울대학교 대학원 :전기· 컴퓨터공학부,2003.
Language
English
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000057467

http://hdl.handle.net/10371/48583
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College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Electrical and Computer Engineering (전기·정보공학부)Theses (Master's Degree_전기·정보공학부)
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