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Deposition and solid phase crystallization of a-Si Ge films and application to thin film transistor
비정질 Si Ge 합금 박막의 증착 및 이의 고상 결정화 거동과 박막 트랜지스터에의 응용

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Authors
김진원
Advisor
김상주
Issue Date
1996
Publisher
서울대학교 대학원
Keywords
solid phase crystallizationthin film transistorlow pressure chemical vapor depositionSi₂H?GeH₄
Description
Thesis (doctoral)--서울대학교 대학원 :금속공학과 재료공학전공,1996.
Language
English
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000082186

http://hdl.handle.net/10371/50821
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College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Material Science and Engineering (재료공학부) Theses (Ph.D. / Sc.D._재료공학부)
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