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1,3-disilabutane을 이용한 SiC 박막 증착 메카니즘에 관한 연구

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Authors
오종혁
Advisor
이지화
Issue Date
1998
Publisher
서울대학교 대학원
Description
학위논문(석사)--서울대학교 대학원 :공업화학과,1998.
Language
Korean
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000075473

http://hdl.handle.net/10371/51139
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College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Chemical and Biological Engineering (화학생물공학부)Theses (Master's Degree_화학생물공학부)
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