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Control over interface properties for fabricating nanopatterns in contact-based nanolithographic processes : 접촉방식의 나노리소그래피에서 나노구조 제작을 위한 계면 성질 제어연구
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- Authors
- Advisor
- 서갑양
- Issue Date
- 2010
- Publisher
- 서울대학교 대학원
- Keywords
- nanotechnology ; 나노공정 ; nanopattern ; 나노 패턴 ; detachment lithography ; 박리 공정 ; work of adhesion ; 나노임프린트 ; nanoimprint ; 고분자 몰드 ; AFM ; 접착력 ; pull-off force and polymer mold ; 원자 현미경
- Description
- Thesis(doctors) --서울대학교 대학원 :기계항공공학부,2010.2.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000032499
https://hdl.handle.net/10371/63898
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