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Atomic oxygen generation by in-situ plasma and post-plasma in dielectric barrier discharges for surface treatment
Cited 7 time in
Web of Science
Cited 8 time in Scopus
- Authors
- Issue Date
- 2010-09-01
- Publisher
- Elsevier
- Citation
- Thin Solid Films 518 6578-6562 (2010)
- Keywords
- dielectric barrier discharge ; in-situ plasma ; post-plasma ; atomic oxygen ; optical actinometry ; NO titration ; numerical simulation
- Abstract
- Atomic oxygen (AO) generation is experimentally and numerically investigated for in-situ plasma and post-plasma produced by dielectric barrier discharges (DBDs) for surface treatment. The AO generation in in-situ plasma inside a DBD reactor is closely related to the plasma characteristics depending on the applied voltage and O2 additive concentration, while the AO density distribution along the post-plasma ejected outside the reactor exit is influenced by the AO generation in the in-situ plasma, gas flow rate, and effluent distance. Contact angle measurements show that the metal surface characteristics, which are treated by in-situ plasma and post-plasma, respectively, are distinctive from each other depending on the AO densities.
- ISSN
- 0040-6090
- Language
- English
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