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Showing results 1 to 2 of 2
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Altmetrics
1998
플라즈마 화학기상증착법에 의한 저유전율 SiOxFy 박막의 증착 및 물성의 안정화
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2002
Deposition and characterization of low-dielectric-constant SiOC thin films for interlayer dielectrics of multilevel interconnection
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