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플라즈마 화학기상증착법에 의한 저유전율 SiOxFy 박막의 증착 및 물성의 안정화

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Authors
김윤해
Advisor
김형준
Issue Date
1998
Publisher
서울대학교 대학원
Description
학위논문(석사)--서울대학교 대학원 :무기재료공학과,1998.
Language
Korean
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000075709

https://hdl.handle.net/10371/52022
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College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Materials Science and Engineering (재료공학부)Theses (Master's Degree_재료공학부)
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