서울대학교 중앙도서관

S-Space 소개

My S-Space

로그인이 필요합니다.

Login

S-Space

Browse

Author

Jump to a point in the index

Or type in a year

Sort by
In order
Results/Page
Authors/record

Showing results 1 to 14 of 14

Issue Date	Title / Author(s) / Citation	File	Altmetrics
2009-06	Plasma Flow Characteristics in a Spray-Type Dielectric Barrier Discharge Reactor Kim, Hyun-Su; Kang, Woo Seok; Kim, Gon-Ho; Hong, Sang Hee IEEE Transactions on Plasma Science, vol. 37, no.6, pp. 773-784	view file DOI
2010-09	Effects of shroud gas injection on material properties of tungsten layers coated by plasma spraying Kim, Sungwoo; Choi, Sooseok; Kim, Gon-Ho; Hong, Sang Hee Thin Solid Films 518 (2010) 6369-6372	DOI
2018-12	Real- time Etch Control to Reduce First Wafer Effect in SF6/O-2/Ar Plasma Ryu, Sangwon; Jang, Yunchang; Kwon, Ji-Won; Park, Damdae; Lee, JongMin; Kim, Gon-Ho 2018 INTERNATIONAL SYMPOSIUM ON SEMICONDUCTOR MANUFACTURING (ISSM), p. 8651157	DOI
2019-04	Design of a self-tuning adaptive model predictive controller using recursive model parameter estimation for real-time plasma variable control Koo, Junmo; Park, Damdae; Ryu, Sangwon; Kim, Gon-Ho; Lee, Youn-Woo Computers and Chemical Engineering, Vol.123, pp.126-142	DOI
2019-12	Quantitation of the ROS production in plasma and radiation treatments of biotargets Ji, Wan-Ook; Lee, Min-Ho; Kim, Gon-Ho; Kim, Eun-Hee Scientific Reports, Vol.9 No.1, p. 19837	DOI
2021-06	Development of Virtual Metrology Using Plasma Information Variables to Predict Si Etch Profile Processed by SF6/O-2/Ar Capacitively Coupled Plasma Kwon, Ji-Won; Ryu, Sangwon; Park, Jihoon; Lee, Haneul; Jang, Yunchang; Park, Seolhye; Kim, Gon-Ho Materials, Vol.14 No.11, p. 3005	DOI
2021-12	Population kinetics modeling of low-temperature argon plasma Chung, Hyun-Kyung; Song, Mi-Young; Kwon, Ji-Won; Lee, Myeong-Geon; Park, Jihoon; Bae, Namjae; Song, Jeamin; Kim, Gon-Ho; Dipti,; Ralchenko, Yuri Atoms, Vol.9 No.4, p. 100	DOI
2022-02	Phenomenology-based model predictive control of electron density in Ar/SF6 capacitively coupled etch plasma Ryu, Sangwon; Kwon, Ji-Won; Lee, Ingyu; Park, Jihoon; Kim, Gon-Ho Journal of the Korean Physical Society, Vol.80 No.3, pp.233-240	DOI
2022-04	Development of model predictive control of fluorine density in SF6/O2/Ar etch plasma by oxygen flow rate Ryu, Sangwon; Kwon, Ji-Won; Park, Jihoon; Lee, Ingyu; Park, Seolhye; Kim, Gon-Ho Current Applied Physics, Vol.36, pp.183-186	DOI
2022-04	Plasma information-based virtual metrology (PI-VM) and mass production process control Park, Seolhye; Seong, Jaegu; Jang, Yunchang; Roh, Hyun-Joon; Kwon, Ji-Won; Lee, Jinyoung; Ryu, Sangwon; Song, Jaemin; Roh, Ki-Baek; Noh, Yeongil; Park, Yoona; Jang, Yongsuk; Cho, Taeyoung; Yang, Jae-Ho; Kim, Gon-Ho Journal of the Korean Physical Society, Vol.80 No.8, pp.647-669	DOI
2022-04	Development of plasma sources and diagnostics for the simulation of fusion edge plasmas Woo, Hyun-Jong; Park, In Sun; Kang, In Je; Cho, Soon-Gook; Choi, Yong-Sup; Ahn, Jeong-Sun; Bae, Min-Keun; Chang, Doo-Hee; Choi, Geun-Sik; Choi, Heung-Gyun; Chung, Bo-Hyun; Chung, Tae Hoon; Do, Jeong-Joon; Goo, Bon-Cheol; Hong, Sung Hoon; Hong, Suk-Ho; Jeon, Jong-Sik; Joo, Sung-Kiu; Jung, Seo Jin; Jung, Seok-Won; Jung, Young-Dae; Jung, Yong Ho; Ko, Kwang-Cheol; Kim, Beom-Sik; Kim, Gon-Ho; Kim, Hye-Ran; Kim, Heung-Su; Kim, Jin-Hee; Kim, Jong-Il; Kim, Jae Yong; Kim, Kyung-Cheol; Kim, Myung Kyu; Kim, Sang-You; Kim, Jin-Woo; Kim, Yong-Kyun; Kwak, Gyea Young; Lee, Dong-Han; Lee, Heon-Ju; Lee, Min Ji; Lee, Myoung-Jae; Lee, Seung-Hwa; Lho, Taihyeop; Park, Eun-Kyung; Seok, Dong Chan; Lee, Byoung-Kyu; Noh, Seung Jeong; Seo, Young-Jun; Shim, Yun-Keun; Sun, Jong Ho; Oh, Byung-Hoon; Oh, Cha-Hwan; Oh, Hye Taek; Oh, Young-Suk; Park, Sang Joon; You, Hyun-Jong; Yoo, Hunsuk; Chung, Kyu-Sun Journal of the Korean Physical Society, Vol.80 No.8, pp.735-758	DOI
2022-04	Simulations of fusion edge plasmas by linear plasma devices: physics and plasma–material interactions Kang, In Je; Bae, Min-Keun; Park, In Sun; Woo, Hyun-Jong; Lho, Taihyeop; Ahn, Jeong-Sun; Chang, Doo-Hee; Cho, Soon-Gook; Choi, Geun-Sik; Choi, Heung-Gyun; Choi, Yong-Sup; Chung, Bo-Hyun; Chung, Tae Hun; Do, Jeong-Joon; Goo, Bon-Cheol; Hong, Sung Hoon; Hong, Suk-Ho; Jeon, Jong-Sik; Joo, Sung-Kiu; Jung, Seo Jin; Jung, Seok-Won; Jung, Young-Dae; Jung, Yong Ho; Ko, Kwang-Cheol; Kim, Beom-Sik; Kim, Gon-Ho; Kim, Hye-Ran; Kim, Heung-Su; Kim, Jin-Hee; Kim, Jong-Il; Kim, Jae Yong; Kim, Kyung-Cheol; Kim, Myung Kyu; Kim, Sang-You; Kim, Jin-Woo; Kim, Yong-Kyun; Kwak, Gyea Young; Lee, Dong-Han; Lee, Heon-Ju; Lee, Min Ji; Lee, Myoung-Jae; Lee, Seung-Hwa; Park, Eun-Kyung; Seok, Dong Chan; Lee, Byoung-Kyu; Noh, Seung Jeong; Seo, Young-Jun; Shim, Yun-Keun; Sun, Jong Ho; Oh, Byung-Hoon; Oh, Cha-Hwan; Oh, Hye Taek; Oh, Young-Suk; Park, Sang Joon; You, Hyun Jong; You, Hun Suk; Chung, Kyu-Sun Journal of the Korean Physical Society, Vol.80 No.8, pp.717-734	DOI
2022-08	Investigation of ion collision effect on electrostatic sheath formation in weakly ionized and weakly collisional plasma Lee, Haneul; Kim, Nam-Kyun; Lee, Myeong-Geon; Kwon, Ji-Won; Son, Sung Hyun; Bae, Namjae; Park, Taejun; Park, Seolhye; Kim, Gon-Ho Plasma Sources Science and Technology, Vol.31 No.8, p. 084006	DOI
2023-01	Investigation of ion-induced etch damages on trench surface of Ge2Sb2Te5 in high density Ar/SF6 plasma Song, Jaemin; Lee, Myeonggeon; Ryu, Sangwon; Jang, Yunchang; Park, Seolhye; Kim, Gon-Ho Current Applied Physics, Vol.45, pp.105-113	DOI

1