Kim, Hyojung; Choi, Min-ju; Suh, Jun Min; Shim, Young-Seok; Im, In Hyuk; Hyun, Daijoon; Yang, Seok Joo; Cai, Zhicheng; Hilal, Muhammad; Lee, Mi Gyoung; Moon, Cheon Woo; Kim, Soo Young; Jang, Ho Won
Materials Science in Semiconductor Processing, Vol.182, p. 108718