Publications
Detailed Information
Characteristics of atmospheric dielectric barrier discharge plasma for photo-resistor etching
Cited 0 time in
Web of Science
Cited 0 time in Scopus
- Authors
- Advisor
- 김곤호
- Issue Date
- 2005
- Publisher
- 서울대학교 대학원
- Keywords
- 대기압 유전체 격벽 방전 ; atmospheric dielectric barrier discharge ; 소모 전력 밀도 ; dissipated power density ; 경계층 ; boundary layer ; 감광제 ; photo-resistor ; 식각 ; etching ; 가스혼합비 ; gas mixing rate ; 기판온도 ; substrate temperature
- Description
- Thesis(master`s)--서울대학교 대학원 :원자핵공학과,2005.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000052782
https://hdl.handle.net/10371/12285
- Files in This Item:
- There are no files associated with this item.
Item View & Download Count
Items in S-Space are protected by copyright, with all rights reserved, unless otherwise indicated.