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Effects of plasma characteristics on homogeneous nucleation in diamond chemical vapor deposition process with supersonic arc-jet plasma : 초음속 아크젯 플라즈마를 이용한 다이아몬드 화학기상증착 공정에서 플라즈마 특성이 균질 핵생성에 미치는 영향
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- Authors
- Advisor
- 홍상희
- Issue Date
- 2008
- Publisher
- 서울대학교 대학원
- Keywords
- 초음속 아크젯 플라즈마 ; supersonic arc-jet plasma ; 다이아몬드 박막 ; diamond film ; 열플라즈마 화학기상증착 ; thermal plasma chemical vapor deposition ; 균질 핵생성 원리 ; homogeneous nucleation mechanism ; 열영동 포집 ; themophoretic sampling ; 방출분광분석 ; optical emission spectroscopy
- Description
- Thesis(doctors) --서울대학교 대학원 :원자핵공학과,2008.8.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000041492
https://hdl.handle.net/10371/12568
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