Browse

Study on fabrication and improvement of resonance dynamics of microcantilever sensors actuated by piezoelectric PZT thick films for bio chip application
PZT 후막으로 구동되는 바이오칩용 미세감지 캔틸레버센서의 제조와 민감도 향상에 대한 연구

Cited 0 time in Web of Science Cited 0 time in Scopus
Authors
박재홍
Advisor
김환
Issue Date
2006
Publisher
서울대학교 대학원
Keywords
PZTcantilever캔틸레버resonanceMEMSsensitivity바이오칩PZT공진thick filmSensitivityBio-MEMS기공률porosity구동력force
Description
Thesis(doctor`s)--서울대학교 대학원 :재료공학부 무기재료공학전공,2006.
Language
English
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000048705

https://hdl.handle.net/10371/12608
Files in This Item:
There are no files associated with this item.
Appears in Collections:
College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Materials Science and Engineering (재료공학부)Theses (Ph.D. / Sc.D._재료공학부)
  • mendeley

Items in S-Space are protected by copyright, with all rights reserved, unless otherwise indicated.

Browse