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College of Engineering/Engineering Practice School (공과대학/대학원)
Dept. of Material Science and Engineering (재료공학부)
Theses (Ph.D. / Sc.D._재료공학부)
Low temperature growth of carbon nano-tubes by internal type inductively coupled plasma assisted chemical vapor deposition
내부형 유도결합 플라즈마 화학 기상 증착법을 이용한 카본나노튜브의 저온공정에 관한 연구
- Authors
- 정동하
- Advisor
- 이정중
- Issue Date
- 2006
- Publisher
- 서울대학교 대학원
- Keywords
- 탄소나노튜브; carbon nano-tube(CNT); 저온공정; low temperature; 유도결합플라즈마; inductively coupled plasma(ICP); 화학기상증착법; PECVD; 스퍼터링; ICP assisted sputtering
- Description
- Thesis(doctoral)--서울대학교 대학원 :재료공학부,2006.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000046490
http://hdl.handle.net/10371/12640
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