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Atomic layer deposition and characterization of SrTiO3 thin films
단원자층 증착법으로 증착된 SrTiO₃박막의 증착 특성 및 물성 평가

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Authors
권오성
Advisor
황철성
Issue Date
2006
Publisher
서울대학교 대학원
Keywords
high-kSrTiO3ALDprecursorsoxidantDRAMtoxself-limiting mechanism
Description
Thesis(doctoral)--서울대학교 대학원 :재료공학부,2006.
Language
English
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000046479

http://hdl.handle.net/10371/12651
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College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Material Science and Engineering (재료공학부) Theses (Ph.D. / Sc.D._재료공학부)
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