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College of Engineering/Engineering Practice School (공과대학/대학원)
Dept. of Material Science and Engineering (재료공학부)
Theses (Ph.D. / Sc.D._재료공학부)
Evaluation of strength, fracture, and fatigue properties of thin film materials for design criterion and reliability of the microelectromechanical systems
MEMS 소자의 설계 기준 및 신뢰성 확보를 위한 박막 소재의 강도 및 파괴, 피로 특성 평가
- Authors
- 손동일
- Advisor
- 권동일
- Issue Date
- 2004
- Publisher
- 서울대학교 대학원
- Keywords
- 미세전자기계시스템 (MEMS); microelectromechanical system (MEMS); 박막; mechanical properties; 기계적 물성; strength; 강도; fracture; 파괴; fatigue; 피로; aluminum; 알루미늄; silicon; 실리콘; nickel; 니켈; reliability; 신뢰성
- Description
- Thesis(doctoral)--서울대학교 대학원 :재료공학부,2004.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000056102
http://hdl.handle.net/10371/12684
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