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Evaluation of strength, fracture, and fatigue properties of thin film materials for design criterion and reliability of the microelectromechanical systems : MEMS 소자의 설계 기준 및 신뢰성 확보를 위한 박막 소재의 강도 및 파괴, 피로 특성 평가
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- Authors
- Advisor
- 권동일
- Issue Date
- 2004
- Publisher
- 서울대학교 대학원
- Keywords
- 미세전자기계시스템 (MEMS) ; microelectromechanical system (MEMS) ; 박막 ; mechanical properties ; 기계적 물성 ; strength ; 강도 ; fracture ; 파괴 ; fatigue ; 피로 ; aluminum ; 알루미늄 ; silicon ; 실리콘 ; nickel ; 니켈 ; reliability ; 신뢰성
- Description
- Thesis(doctoral)--서울대학교 대학원 :재료공학부,2004.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000056102
https://hdl.handle.net/10371/12684
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