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플라즈마 화학 기상 증착법을 이용한 TiNAlN, TiNTiB₂다층박막의 제조 및 특성에 관한 연구
Fabrication and properties of the TiNAlN, TiNTiB₂multilayer coatings deposited by plasma enhanced chemical vapor deposition

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  • mendeley

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