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플라즈마 화학 기상 증착법을 이용한 TiNAlN, TiNTiB₂다층박막의 제조 및 특성에 관한 연구 : Fabrication and properties of the TiNAlN, TiNTiB₂multilayer coatings deposited by plasma enhanced chemical vapor deposition

DC Field Value Language
dc.contributor.advisor이정중-
dc.contributor.author임주완-
dc.date.accessioned2009-11-18-
dc.date.available2009-11-18-
dc.date.copyright2003.-
dc.date.issued2003-
dc.identifier.urihttp://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000058356kor
dc.identifier.urihttps://hdl.handle.net/10371/12689-
dc.description학위논문(박사)--서울대학교 대학원 :재료공학부,2003.kor
dc.format.extentxi, 111 장kor
dc.language.isokokor
dc.publisher서울대학교 대학원kor
dc.subject플라즈마 화학증착법(PECVD)kor
dc.subjectPlasma enhanced chemical vapor depositionkor
dc.subject나노스케일 다층박막kor
dc.subjectNanoscale multilayerkor
dc.subjectTiN/AlNkor
dc.subjectMetastable phasekor
dc.subject준안정상kor
dc.subjectTiN/AlNkor
dc.subjectTiN/TiB2kor
dc.subjectTiN/TiB2kor
dc.subject마모kor
dc.subjectWearkor
dc.subjectHardnesskor
dc.title플라즈마 화학 기상 증착법을 이용한 TiNAlN, TiNTiB₂다층박막의 제조 및 특성에 관한 연구kor
dc.title.alternativeFabrication and properties of the TiNAlN, TiNTiB₂multilayer coatings deposited by plasma enhanced chemical vapor depositionkor
dc.typeThesis-
dc.contributor.department재료공학부-
dc.description.degreeDoctorkor
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