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플라즈마 화학 기상 증착법을 이용한 TiNAlN, TiNTiB₂다층박막의 제조 및 특성에 관한 연구 : Fabrication and properties of the TiNAlN, TiNTiB₂multilayer coatings deposited by plasma enhanced chemical vapor deposition
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- Authors
- Advisor
- 이정중
- Issue Date
- 2003
- Publisher
- 서울대학교 대학원
- Keywords
- 플라즈마 화학증착법(PECVD) ; Plasma enhanced chemical vapor deposition ; 나노스케일 다층박막 ; Nanoscale multilayer ; TiN/AlN ; Metastable phase ; 준안정상 ; TiN/AlN ; TiN/TiB2 ; TiN/TiB2 ; 마모 ; Wear ; Hardness
- Description
- 학위논문(박사)--서울대학교 대학원 :재료공학부,2003.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000058356
https://hdl.handle.net/10371/12689
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