S-Space College of Engineering/Engineering Practice School (공과대학/대학원) Dept. of Material Science and Engineering (재료공학부) Theses (Ph.D. / Sc.D._재료공학부)
Study on interface states of Al₂O₃Si and work function tunability of gate metal stack in MOS capacitor
- Issue Date
- 서울대학교 대학원
- Metal-oxide-semiconductor (MOS); Deep level transient spectroscopy (DLTS); Fixed Charge; Slow; Fast Interface state; Minority Capture Process; Capture Cross-section; Metal Gate; Work Function Tunability; Stacked Bi-metal Layers
- Thesis(doctoral)--서울대학교 대학원 :재료공학부,2005.
- Files in This Item: There are no files associated with this item.