S-Space College of Engineering/Engineering Practice School (공과대학/대학원) Dept. of Material Science and Engineering (재료공학부) Theses (Ph.D. / Sc.D._재료공학부)
Fabrication and characterizations of self-aligned poly-Si gate transistors using HfO₂thin films
- Issue Date
- 서울대학교 대학원
- 고유전률; High-k; HfO2; HfO2; ALD; ALD; 원료물질; precursors; 산화제; oxidants; 신뢰성; reliability; MOSFET; MOSFET; 누설전류기구; leakage current mechanism; 계면트랩; interface trap density; 전하이동도; channel mobility
- Thesis(doctoral)--서울대학교 대학원 :재료공학부,2005.
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