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Electron-beam projection nanopatterning using crystalline lattice images : : 결정 격자 이미지를 이용한 전자빔 투사 방식의 나노패터닝
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- Authors
- Advisor
- 김기범
- Issue Date
- 2005
- Publisher
- 서울대학교 대학원
- Keywords
- 나노리소그래피 ; nanolithography ; 전자빔 리소그래피 ; electron-beam lithography ; atomic image projection electron-beam lithography ; atomic image projection electron-beam lithography ; 고분해능 이미지 ; high-resolution image ; 투과전자현미경 ; transmission electron microscopy ; 전자빔 레지스트 ; electron-beam resist
- Description
- Thesis(doctoral)--서울대학교 대학원 :재료공학부,2005.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000050047
https://hdl.handle.net/10371/12742
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