Browse
S-Space
College of Engineering/Engineering Practice School (공과대학/대학원)
Dept. of Material Science and Engineering (재료공학부)
Theses (Ph.D. / Sc.D._재료공학부)
(A) study on electrical contact behavior and reliability of metal thin-film contacts for RF MEMS switches
RF MEMS 스위치를 위한 금속 박막 접촉의 전기적 접촉 거동 및 신뢰성 연구
- Authors
- 권혁
- Advisor
- 주영창
- Issue Date
- 2008
- Publisher
- 서울대학교 대학원
- Keywords
- RF MEMS 스위치; electrical contact; 접촉 금속 박막; RF MEMS switch; 접촉 저항; contact resistance; 신뢰성; contact force; reliability; gold; platinum; iridium; piezoelectric actuator
- Description
- Thesis(doctors) --서울대학교 대학원 :재료공학부,2008.8.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000041531
http://hdl.handle.net/10371/13203
- Files in This Item: There are no files associated with this item.
Items in S-Space are protected by copyright, with all rights reserved, unless otherwise indicated.