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Fabrication of nano-scale molds using room-temperaure imprint lithography(RTIL) : 상온 임프린트 리소그래피를 이용한 나노몰드 제작
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- Authors
- Advisor
- 이홍희
- Issue Date
- 2007
- Publisher
- 서울대학교 대학원
- Keywords
- 상온 임프린트 ; RTIL(room-temperature imprint lithography) ; 박막 ; thin film ; 소성변형 ; plastic deformation ; 패턴 사이즈 감소 ; size reduction ; edge lithography ; edge lithography
- Description
- 학위논문(석사) --서울대학교 대학원 :화학생물공학부,2007.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000044001
https://hdl.handle.net/10371/13470
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