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응력이 인가된 PZT 막의 제조와 특성 평가 : Fabrication and evaluation of the stress induced PZT films
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- Authors
- Advisor
- 김현이
- Issue Date
- 2008
- Publisher
- 서울대학교 대학원
- Keywords
- Piezoelectric ; Piezoelectric ; Ferroelectric ; Ferroelectric ; PZT film ; PZT film ; Sputtering ; Sputtering ; Sol-gel ; Sol-gel ; Residual stress ; Residual stress ; Free-standing film ; Free-standing film
- Description
- 학위논문(박사) --서울대학교 대학원 :재료공학부,2008.8.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000041528
https://hdl.handle.net/10371/13522
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