S-Space College of Engineering/Engineering Practice School (공과대학/대학원) Dept. of Material Science and Engineering (재료공학부) Theses (Ph.D. / Sc.D._재료공학부)
Study on atomic layer deposited high-k HfO₂ film and reliability problem based on chlorine carbon residue
- Issue Date
- 서울대학교 대학원
- 학위논문(박사) --서울대학교 대학원 :재료공학부,2007.
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