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Fabrication of PZT-Based piezoelectric thick film by aerosol deposition method and its application to piezoelectric devices : 에어로졸 증착법을 이용한 PZT계 압전 후막의 제조 및 압전 소자로의 응용
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- Authors
- Advisor
- 김도연
- Issue Date
- 2008
- Publisher
- 서울대학교 대학원
- Keywords
- PZT ; PZT ; 후막 ; Thick-film ; 에어로졸 증착법 ; Aerosol deposition ; Zr ; Zr ; Ti 비 ; Ti ratio ; 잔류 압축 응력 ; Residual compressive stress ; 유기물 ; Organic species ; 미러 액츄에이터 ; piezoelectric ; mirror actuator
- Description
- Thesis(doctors)--서울대학교 대학원 :재료공학부,2008.2.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000039475
https://hdl.handle.net/10371/13573
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