Publications
Detailed Information
열 필라멘트법에 의한 다이아몬드와 다결정 실리콘 박막의 화학 기상 증착 : Chemical vapor deposition of diamond and poly-Si thin films by hot filament method
Cited 0 time in
Web of Science
Cited 0 time in Scopus
- Authors
- Advisor
- 김도연
- Issue Date
- 2003
- Publisher
- 서울대학교 대학원
- Keywords
- Hot filament CVD ; 열 필리멘트법 ; Diamond ; 다이아몬드 ; Charged cluster model ; 전하를 띤 클러스터 모델 ; poly-Si ; 다결정 실리콘 ; Twin ; 쌍정
- Description
- 학위논문(박사)--서울대학교 대학원 :재료공학부,2003.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000059792
https://hdl.handle.net/10371/13638
- Files in This Item:
- There are no files associated with this item.
Item View & Download Count
Items in S-Space are protected by copyright, with all rights reserved, unless otherwise indicated.