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2차원 Fin 구조에서의 Si 결정면 발달에 관한 연구
Study on facet evolution on Si 2-D Fin structure

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Authors
배덕규
Advisor
윤의준
Issue Date
2005
Publisher
서울대학교 대학원
Keywords
MOS-finFETMOS-finFETSEGSEGUHV-CVDUHV-CVDAdatom 확산Adatom diffusion결정면 길이Facet Length표면에너지Surface energy
Description
학위논문(석사)--서울대학교 대학원 :재료공학부,2005.
Language
Korean
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000051049

https://hdl.handle.net/10371/14296
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College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Materials Science and Engineering (재료공학부)Theses (Master's Degree_재료공학부)
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