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2차원 Fin 구조에서의 Si 결정면 발달에 관한 연구 : Study on facet evolution on Si 2-D Fin structure
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- Authors
- Advisor
- 윤의준
- Issue Date
- 2005
- Publisher
- 서울대학교 대학원
- Keywords
- MOS-finFET ; MOS-finFET ; SEG ; SEG ; UHV-CVD ; UHV-CVD ; Adatom 확산 ; Adatom diffusion ; 결정면 길이 ; Facet Length ; 표면에너지 ; Surface energy
- Description
- 학위논문(석사)--서울대학교 대학원 :재료공학부,2005.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000051049
https://hdl.handle.net/10371/14296
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