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In situ, real-time stress measurements during growth of thin films on (001) InP using multibeam optical stress sensor : 다중광 응력 측정 장비를 이용한 InP 기판 위의 에피 박막 응력 실시간 관찰
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- Authors
- Advisor
- 윤의준
- Issue Date
- 2005
- Publisher
- 서울대학교 대학원
- Keywords
- multibeam optical stress sensor(MOSS) ; multibeam optical stress sensor (MOSS) ; 변형률 ; strain ; 실시간 응력 관찰 ; real-time stress measurement ; InP ; InP ; InGaAs ; InGaAs ; InAs 양자점(quantum dots) ; InAs quantum dots (QDs) ; GaAs ; GaAs
- Description
- Thesis(master`s)--서울대학교 대학원 :재료공학부,2005.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000051031
https://hdl.handle.net/10371/14314
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