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반도체 배선용 저유전 물질에서 구리 확산에 대한 전기적, 기계적 특성 평가

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Authors
이희찬
Advisor
주영창
Issue Date
2004
Publisher
서울대학교 대학원
Keywords
저유전 물질Low-k material구리 확산Cu drift신뢰성reliabilityTDDBTDDBC-VC-V
Description
학위논문(석사)--서울대학교 대학원 :재료공학부,2004.
Language
Korean
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000055758

https://hdl.handle.net/10371/14340
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College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Material Science and Engineering (재료공학부) Theses (Master's Degree_재료공학부)
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