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고집적 FRAM 소자 제작을 위한 하부 Pt 전극의 분석 및 Pb(Zr,Ti)O₃박막의 특성 연구
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- Authors
- Advisor
- 황철성
- Issue Date
- 2003
- Publisher
- 서울대학교 대학원
- Keywords
- Pt전극 ; Pt electrode ; DC 마그네트론 스퍼터링 ; DC Magnetron Sputtering ; High Resolution XRD ; High Resolution XRD ; High Resolution TEM ; High Resolution TEM ; Pb(Zr35 ; Pb(Zr35 ; Ti65)O₃ ; Ti65)O₃
- Description
- 학위논문(석사)--서울대학교 대학원 :재료공학부,2003.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000058479
https://hdl.handle.net/10371/14654
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