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CVD로 증착된 Ru 박막의 응력 거동 분석 및 결정립 성장 억제

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Authors
임하진
Advisor
김형준
Issue Date
2003
Publisher
서울대학교 대학원
Keywords
RuRu박막Thin film전극Electrode응력Stress결정립 성장Grain growth배향성Orientation
Description
학위논문(석사)--서울대학교 대학원 :재료공학부,2003.
Language
Korean
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000057668

https://hdl.handle.net/10371/14683
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College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Materials Science and Engineering (재료공학부)Theses (Master's Degree_재료공학부)
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