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Sol-gel법으로 제조한 seed layer위에 sputtering법으로 증착한 PZT박막의 방향성 조정에 관한 연구
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- Authors
- Advisor
- 김현이
- Issue Date
- 2003
- Publisher
- 서울대학교 대학원
- Keywords
- 압전 ; PZT ; Seed layer ; Sol-gel ; Sputter ; Orientation ; Deposition rate ; Lead zirconium titanate ; Thin film
- Description
- 학위논문(석사)--서울대학교 대학원 :재료공학부,2003.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000057786
https://hdl.handle.net/10371/14688
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