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The dynamics of electron beam scattering on metal membranes: nanopore formation in metal membranes using transmission electron microscopy

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Issue Date
2018-11-12
Publisher
Springer Open
Citation
Nano Convergence, 5(1):32
Keywords
Nanopore perforationFocused e-beamScattering cross-section
Abstract
Abstract
The dynamics of nanopore formation in metal membranes using the highly focused and high energy electron beams (e-beams) of transmission electron microscopy instruments was investigated. Various metals such as Al, Ti, Cr, Cu, and Au were selected to investigate the effect of the atomic mass of the metal on nanopore drilling, namely, elastic versus inelastic scattering. We demonstrated that the effect of elastic scattering (pore formation by sputtering) decreased as the atomic mass of the metal increased. Furthermore, experimental cross-sections obtained from normalized drilled volume vs. electron dose curves (characteristic contrast curves) matched well the calculated atomic displacement cross-sections determined from elastic scattering data. The sputtering energies of Ti, Cr, and Cu were determined to be approximately 10, 9, and 7 eV, respectively, which were in good agreement with the reported range of sputtering energy values.
ISSN
2196-5404
Language
English
URI
https://doi.org/10.1186/s40580-018-0164-z

https://hdl.handle.net/10371/146923
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College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Materials Science and Engineering (재료공학부)Journal Papers (저널논문_재료공학부)
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