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PE-ALD로 증착한 SnO2 박막의 결정학적 배향성에 따른 수소와 일산화탄소 가스 감응 특성

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Authors
김대홍
Advisor
홍성현
Issue Date
2008
Publisher
서울대학교 대학원
Keywords
가스 센서gas sensorSnO2 박막SnO2 thin filmPE-ALDPE-ALD결정 배향성orientation사파이어 기판sapphire substrateepitaxyTEMpole figureXPS
Description
학위논문(석사) --서울대학교 대학원 :재료공학부,2008.8.
Language
Korean
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000042149

http://hdl.handle.net/10371/14826
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College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Material Science and Engineering (재료공학부) Theses (Master's Degree_재료공학부)
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