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Deep RIE 공정을 이용한 박막형 공진기소자 및 필터의 제작
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- Authors
- Advisor
- 김형준
- Issue Date
- 2008
- Publisher
- 서울대학교 대학원
- Keywords
- 박막형공진기 ; FBAR ; 압전층 ; piezoelectric layer ; AlN ; AlN ; 우선배향성 ; orientation ; rocking curve ; rocking curve ; deep reactive ion etching ; deep reactive ion etching ; 음향파 ; band pass filter ; 대역통과필터
- Description
- 학위논문(석사) --서울대학교 대학원 :재료공학부,2008.2.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000041116
https://hdl.handle.net/10371/14835
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