Publications
Detailed Information
(The) study on the crystallization behavior by the current from substrate d.c. bias voltage during sputter deposition
Cited 0 time in
Web of Science
Cited 0 time in Scopus
- Authors
- Advisor
- 김기범
- Issue Date
- 2008
- Publisher
- 서울대학교 대학원
- Keywords
- 비정질 박막 ; amorphous thin film ; 결정화 ; crystallization ; 양극 바이어스 플라즈마 ; positive bias plasma ; Joule heating ; Joule heating ; Ge2Sb2Te5 ; Ge2Sb2Te5 ; 저마늄 ; Ge
- Description
- Thesis(masters) --서울대학교 대학원 :재료공학부,2008.2.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000041102
https://hdl.handle.net/10371/14861
- Files in This Item:
- There are no files associated with this item.
Item View & Download Count
Items in S-Space are protected by copyright, with all rights reserved, unless otherwise indicated.