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Ir 기판 표면 처리에 따른 MOCVD Pb(Zr,Ti)O₃박막의 증착 및 특성에 관한 연구
Deposition and characterization of MOCVD Pb(Zr,Ti)O₃thin films with in-situ surface treatment of Ir substrate

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Authors
이근
Advisor
황철성
Issue Date
2007
Publisher
서울대학교 대학원
Keywords
Pb(ZrPb(ZrTi)O₃Ti)O₃유기화학기상증착법MOCVDself-regulation windowself-regulation window전처리pre-treatment
Description
학위논문(석사)--서울대학교 대학원 :재료공학부,2007.
Language
Korean
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000045726

http://hdl.handle.net/10371/14862
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College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Material Science and Engineering (재료공학부) Theses (Master's Degree_재료공학부)
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