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Ir 기판 표면 처리에 따른 MOCVD Pb(Zr,Ti)O₃박막의 증착 및 특성에 관한 연구 : Deposition and characterization of MOCVD Pb(Zr,Ti)O₃thin films with in-situ surface treatment of Ir substrate
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- Authors
- Advisor
- 황철성
- Issue Date
- 2007
- Publisher
- 서울대학교 대학원
- Keywords
- Pb(Zr ; Pb(Zr ; Ti)O₃ ; Ti)O₃ ; 유기화학기상증착법 ; MOCVD ; self-regulation window ; self-regulation window ; 전처리 ; pre-treatment
- Description
- 학위논문(석사)--서울대학교 대학원 :재료공학부,2007.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000045726
https://hdl.handle.net/10371/14862
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