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단원자층 증착법(ALD)을 이용한 PbTiO3 박막의 증착과 특성평가 : Deposition and characterization of PbTiO3films using atomic layer deposition

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Authors

황규원

Advisor
황철성
Issue Date
2006
Publisher
서울대학교 대학원
Keywords
PbTiO3ALDperovskitepyrochloreannealing
Description
학위논문(석사) --서울대학교 대학원 :재료공학부,2006.
Language
Korean
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000049253

https://hdl.handle.net/10371/15009
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