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유도결합 플라즈마 화학 기상 증착법으로 제조된 SnO₂박막의 광학적 특성평가 : Optical properties of SnO₂ films deposited by inductively coupled plasma assisted chemical vapor deposition
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- Authors
- Advisor
- 이정중
- Issue Date
- 2005
- Publisher
- 서울대학교 대학원
- Keywords
- 유도결합 플라즈마 ; ICP-CVD ; 열 반사 거울 박막 ; SnO2 ; Heat-mirror
- Description
- 학위논문(석사)--서울대학교 대학원 :재료공학부,2005.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000051087
https://hdl.handle.net/10371/15093
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