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단원자 증착법(ALD)으로 증착한 Ru 박막을 이용한 박막형 다층 세라믹 캐패시터(MLCC)의 제조 및 특성 연구

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Authors
이상영
Advisor
황철성
Issue Date
2008
Publisher
서울대학교 대학원
Keywords
원자층증착방법(ALD)ALD루테늄(Ru)Ru전극electrodeMIM capacitorMIM capacitor건식 식각dry etch습식 식각wet etch
Description
학위논문(석사) --서울대학교 대학원 :재료공학부,2008.2.
Language
Korean
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000041118

https://hdl.handle.net/10371/15111
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College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Material Science and Engineering (재료공학부) Theses (Master's Degree_재료공학부)
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