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(A) study on the utilization of surface treatment for anisotropic wrinkle patterning and align stiction in imprint lithography process
표면처리 효과를 이용한 자기조립형 대면적 미세패턴 형성과 임프린트 공정에서의 정렬마찰 저감에 대한 연구

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  • mendeley

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