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Enhancement of growth rate in atomic layer deposition of dielectric materials
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Web of Science
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- Authors
- Advisor
- 김형준
- Major
- 재료공학부
- Issue Date
- 2011-02
- Publisher
- 서울대학교 대학원
- Keywords
- 원자층증착법 ; 증착속도 ; 지르코늄 산화물 ; 하프늄 산화물 ; 타이타늄 산화물 ; 실리콘 산화물 ; 표면흡착 ; 촉매반응 ; Atomic Layer Deposition ; Growth Rate ; Zirconium Oxide ; Hafnium Oxide ; Titanium Oxide ; Silicon Oxide ; Surface Adsorption ; Catalytic Reaction
- Description
- 학위논문 (박사)-- 서울대학교 대학원 : 재료공학부, 2011.2. 김형준.
- Language
- eng
- URI
- https://hdl.handle.net/10371/158958
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000028952
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