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PECVD법에 의해 증착 된 비정질 실리콘의 결정화와 다결정 실리콘 박막 트랜지스터의 제작 : The crystallization of Amorphous-Silicon deposited by PECVD and its Polycrystalline-Silicon Thin Film Transistors
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 주승기 | - |
| dc.contributor.author | 윤은애 | - |
| dc.date.accessioned | 2019-07-10T05:08:08Z | - |
| dc.date.available | 2019-07-10T05:08:08Z | - |
| dc.date.issued | 2011-02 | - |
| dc.identifier.other | 000000029780 | - |
| dc.identifier.uri | https://hdl.handle.net/10371/159490 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000029780 | ko_KR |
| dc.description | 학위논문 (석사)-- 서울대학교 대학원 : 재료공학부, 2011.2. 주승기. | - |
| dc.format.extent | vi, 56장 | - |
| dc.language.iso | kor | - |
| dc.publisher | 서울대학교 대학원 | - |
| dc.subject | 금속유도측면결정화 | - |
| dc.subject | 다결정 실리콘 박막 트랜지스터 | - |
| dc.subject | MILC | - |
| dc.subject | Metal Induced Lateral Crystallization | - |
| dc.subject | polycrystalline silicon thin film transistor | - |
| dc.subject | PECVD a-Si:H | - |
| dc.subject | Dehydrogenation | - |
| dc.title | PECVD법에 의해 증착 된 비정질 실리콘의 결정화와 다결정 실리콘 박막 트랜지스터의 제작 | - |
| dc.title.alternative | The crystallization of Amorphous-Silicon deposited by PECVD and its Polycrystalline-Silicon Thin Film Transistors | - |
| dc.type | Thesis | - |
| dc.type | Dissertation | - |
| dc.description.degree | Master | - |
| dc.contributor.affiliation | 재료공학부 | - |
| dc.date.awarded | 2011-02 | - |
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