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PECVD법에 의해 증착 된 비정질 실리콘의 결정화와 다결정 실리콘 박막 트랜지스터의 제작 : The crystallization of Amorphous-Silicon deposited by PECVD and its Polycrystalline-Silicon Thin Film Transistors
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- Authors
- Advisor
- 주승기
- Major
- 재료공학부
- Issue Date
- 2011-02
- Publisher
- 서울대학교 대학원
- Keywords
- 금속유도측면결정화 ; 다결정 실리콘 박막 트랜지스터 ; MILC ; Metal Induced Lateral Crystallization ; polycrystalline silicon thin film transistor ; PECVD a-Si:H ; Dehydrogenation
- Description
- 학위논문 (석사)-- 서울대학교 대학원 : 재료공학부, 2011.2. 주승기.
- Language
- kor
- URI
- https://hdl.handle.net/10371/159490
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000029780
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