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DRAM capacitor 전기적 특성 개선을 위한 적층 구조 전극 연구
Dielectric performance improvement in DRAM capacitors using bi-metal electrodes

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Authors
한소라
Advisor
황철성
Major
재료공학부(하이브리드 재료)
Issue Date
2011-08
Publisher
서울대학교 대학원
Keywords
ALDRuIrPt합전극MIM capacitor일함수
Description
학위논문 (석사)-- 서울대학교 대학원 : 재료공학부(하이브리드 재료), 2011.8. 황철성.
Language
kor
URI
http://hdl.handle.net/10371/159521

http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000031636
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College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Material Science and Engineering (재료공학부) Theses (Master's Degree_재료공학부)
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