Browse

S-Space College of Engineering/Engineering Practice School (공과대학/대학원) Dept. of Materials Science and Engineering (재료공학부) Theses (Master's Degree_재료공학부)

DRAM capacitor 전기적 특성 개선을 위한 적층 구조 전극 연구 : Dielectric performance improvement in DRAM capacitors using bi-metal electrodes

Cited 0 time in Web of Science Cited 0 time in Scopus
Export
Authors

한소라

Advisor
황철성
Major
재료공학부(하이브리드 재료)
Issue Date
2011-08
Publisher
서울대학교 대학원
Keywords
ALD ; Ru ; Ir ; Pt ; 합전극 ; MIM capacitor ; 일함수
Description
학위논문 (석사)-- 서울대학교 대학원 : 재료공학부(하이브리드 재료), 2011.8. 황철성.
Language
kor
URI
https://hdl.handle.net/10371/159521

http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000031636
Files in This Item:
There are no files associated with this item.
Appears in Collections:
College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Materials Science and Engineering (재료공학부)Theses (Master's Degree_재료공학부)
Show Full Item Record
Find it @ SNU

  • mendeley

Items in S-Space are protected by copyright, with all rights reserved, unless otherwise indicated.

Seoul National University Library, 1 Gwanak-ro, Gwanak-gu, Seoul 08826, Korea TEL: 02-880-5567 Email: s-space@snu.ac.kr youtube

RSS 1.0 RSS 2.0 Atom

Hello

Browse

News About S-Space Seoul National University Library LOGIN