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AlGaN/GaN HEMT의 오믹 edge 개선과 테이퍼 소오스 비아 공정 개발 : Improved edge acuity of ohmic contacts and tapered source via process of AlGaN/GaN HEMTs
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- Authors
- Advisor
- 서광석
- Major
- 전기. 컴퓨터공학부
- Issue Date
- 2011-08
- Publisher
- 서울대학교 대학원
- Keywords
- AlGaN ; GaN HEMT ; ohmic metal ; edge acuity ; breakdown voltage ; tapered source via ; uniformity
- Description
- 학위논문 (석사)-- 서울대학교 대학원 : 전기. 컴퓨터공학부, 2011.8. 서광석.
- Language
- kor
- URI
- https://hdl.handle.net/10371/159624
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000031697
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