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College of Engineering/Engineering Practice School (공과대학/대학원)
Dept. of Chemical and Biological Engineering (화학생물공학부)
Theses (Master's Degree_화학생물공학부)
구리 화학적 기계적 평탄화 공정에서 유기산 세정액의 영향성 연구 : Study on th effect of cleaning solution based on organic acid in copper chemical mechanical planarization
- Authors
- Advisor
- 김재정
- Major
- 화학생물공학부
- Issue Date
- 2011-02
- Publisher
- 서울대학교 대학원
- Keywords
- 구리배선형성 ; 구리 CMP ; 세정액 ; 착물형성제 ; 부식방지제 ; 에틸렌디아민사초산 ; 구연산 ; 아미노테트라졸 ; 부식 ; 2차 오염 ; 클리닝 ; 워싱 ; metallization ; copper CMP ; cleaning solution ; complexing agent ; corrosion inhibitor ; ethylenediaminetetraacetic acid ; EDTA ; citric acid ; 5-aminotetrazole ; corrosion ; cleaning ; washing
- Description
- 학위논문 (석사)-- 서울대학교 대학원 : 화학생물공학부, 2011.2. 김재정.
- Language
- kor
- URI
- https://hdl.handle.net/10371/160225
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000030041
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