S-Space College of Engineering/Engineering Practice School (공과대학/대학원) Dept. of Chemical and Biological Engineering (화학생물공학부) Chemical Convergence for Energy and Environment (에너지환경 화학융합기술전공) Journal Papers (저널논문_에너지환경 화학융합기술전공)
Effect of calcination process on synthesis of ceria particles, and its influence on shallow trench isolation chemical mechanical planarization performance
- Kim, Dae-Hyeong; Kang, Hyun-Goo; Kim, Sang-Kyun; Paik, Ungyu; Park, Jea-Gun
- Issue Date
- Japanese Journal of Applied Physics, Vol.45 No.6A, pp.4893-4897
- The effect of the calcination process for cerium carbonate, a precursor of ceria, on the degree of synthesis and colloidal properties of ceria particles in aqueous media, which greatly influence shallow trench isolation (STI) chemical mechanical planarization (CMP) performance, was investigated. A two-step calcination process, consisting of decarbonation and crystal growth, resulted in a higher degree of synthesis for the same crystal size, a narrower particle size distribution, and better dispersion of the ceria particles, than conventional one-step calcination. These properties enhanced certain aspects of STI CMP performance, leading to a higher oxide removal rate, a better selectivity between oxide and nitride, and fewer defects, including remaining particles.
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