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Effect of calcination process on synthesis of ceria particles, and its influence on shallow trench isolation chemical mechanical planarization performance

Cited 4 time in Web of Science Cited 4 time in Scopus
Authors
Kim, Dae-Hyeong; Kang, Hyun-Goo; Kim, Sang-Kyun; Paik, Ungyu; Park, Jea-Gun
Issue Date
2006-06
Citation
Japanese Journal of Applied Physics, Vol.45 No.6A, pp.4893-4897
Keywords
calcinationdensityparticle size distributionagglomerationceriaslurrySTI CMP
Abstract
The effect of the calcination process for cerium carbonate, a precursor of ceria, on the degree of synthesis and colloidal properties of ceria particles in aqueous media, which greatly influence shallow trench isolation (STI) chemical mechanical planarization (CMP) performance, was investigated. A two-step calcination process, consisting of decarbonation and crystal growth, resulted in a higher degree of synthesis for the same crystal size, a narrower particle size distribution, and better dispersion of the ceria particles, than conventional one-step calcination. These properties enhanced certain aspects of STI CMP performance, leading to a higher oxide removal rate, a better selectivity between oxide and nitride, and fewer defects, including remaining particles.
ISSN
0021-4922
URI
http://hdl.handle.net/10371/164293
DOI
https://doi.org/10.1143/JJAP.45.4893
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College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Chemical and Biological Engineering (화학생물공학부)Chemical Convergence for Energy and Environment (에너지환경 화학융합기술전공)Journal Papers (저널논문_에너지환경 화학융합기술전공)
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